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1

Modelling of heat transfer processes in low-pressure CVD reactors

Journal:

Year:

1991

Language:

english

File:

PDF, 335 KB

english, 1991

2

Modelling of low pressure chemical vapour deposition of Si3N4 thin films from dichlorosilane and ammonia

G. Peev, L. Zambov, I. Nedev

Journal:

Thin Solid Films

Year:

1989

Language:

english

File:

PDF, 429 KB

english, 1989

3

Kinetics of the chemical reaction between dichlorosilane and ammonia during silicon nitride film deposition

G. Peev, L. Zambov, Y. Yanakiev

Journal:

Thin Solid Films

Year:

1990

Language:

english

File:

PDF, 464 KB

english, 1990

4

Optimization of low pressure silicon nitride film growth from dichlorosilane and ammonia in integrated circuit manufacture

G. Peev, L. Zambov

Journal:

Thin Solid Films

Year:

1991

Language:

english

File:

PDF, 442 KB

english, 1991

5

Low-Pressure CVD of Carbon Nitride Using Triazine-Containing Precursors

B. L. Ivanov, L. M. Zambov, G. T. Georgiev, C. Popov, M. F. Plass, W. Kulisch

Journal:

Chemical Vapor Deposition

Year:

1999

Language:

english

File:

PDF, 559 KB

english, 1999

6

Gas-Sensitive Properties of Nitrogen-Rich Carbon Nitride Films

L. M. Zambov, C. Popov, N. Abedinov, M. F. Plass, W. Kulisch, T. Gotszalk, P. Grabiec, I. W. Rangelow, R. Kassing

Journal:

Advanced Materials

Year:

2000

Language:

english

File:

PDF, 250 KB

english, 2000

7

ChemInform Abstract: Low-Pressure CVD of Carbon Nitride Using Triazine-Containing Precursors.

Borislav L. Ivanov, Ludmil M. Zambov, Georgy T. Georgiev, Cyril Popov, Martin F. Plass, Wilhelm Kulisch

Journal:

Year:

2000

File:

PDF, 27 KB

2000

8

ChemInform Abstract: Gas-Sensitive Properties of Nitrogen-Rich Carbon Nitride Films.

Ludmil M. Zambov, Cyril Popov, Nikolai Abedinov, Martin F. Plass, Wilhelm Kulisch, Teodor Gotszalk, Peter Grabiec, Ivo W. Rangelow, Rainer Kassing

Journal:

Year:

2000

File:

PDF, 28 KB

2000

9

Template-Directed CVD of Dielectric Nanotubes

L. Zambov, A. Zambova, M. Cabassi, T.S. Mayer

Journal:

Chemical Vapor Deposition

Year:

2003

Language:

english

File:

PDF, 502 KB

english, 2003

10

Advanced Roll-to-Roll Plasma-Enhanced CVD Silicon Carbide Barrier Technology for Protection from Detrimental Gases

L. Zambov, V. Shamamian, K. Weidner, M. Loboda

Journal:

Chemical Vapor Deposition

Year:

2011

Language:

english

File:

PDF, 555 KB

english, 2011

11

Kinetics of homogeneous decomposition of silane

Journal:

Journal of Crystal Growth

Year:

1992

Language:

english

File:

PDF, 1.20 MB

english, 1992

12

Characterization of arsenphosphosilicate glass films for VLSI applications—Part I. Composition and physicochemical properties

L. Zambov, I. Nedev, Y. Yanakiev

Journal:

Solid-State Electronics

Year:

1991

Language:

english

File:

PDF, 573 KB

english, 1991

13

Characterization of arsenphosphosilicate glass films for VLSI applications—Part II. Step coverage and planarization

L. Zambov, Y. Yanakiev, I. Nedev, M. Anastassova

Journal:

Solid-State Electronics

Year:

1991

Language:

english

File:

PDF, 909 KB

english, 1991

14

Composition, structure and properties of silicon nitride films grown from dichlorosilane and ammonia at low pressure

L. Zambov, G. Peev, V. Shanov, S. Drumeva

Journal:

Year:

1992

Language:

english

File:

PDF, 580 KB

english, 1992

15

Effect of vacuum rapid thermal annealing on the properties of SiNx films

G Beshkov, D.B Dimitrov, N Velchev, P Petrov, B Ivanov, L Zambov, T Dimitrova

Journal:

Year:

2000

Language:

english

File:

PDF, 147 KB

english, 2000

16

Thin CNx films prepared by vacuum rapid thermal annealing

G Beshkov, DB Dimitrov, St Georgiev, P Petrov, L Zambov, B Ivanov, C Popov, M Georgiev

Journal:

Year:

1998

Language:

english

File:

PDF, 269 KB

english, 1998

17

The effect of d.c. substrate bias on the properties of nitrogen-rich CNx films

C. Popov, M.F. Plass, L.M. Zambov, W. Kulisch

Journal:

Surface and Coatings Technology

Year:

2001

Language:

english

File:

PDF, 275 KB

english, 2001

18

Physical properties of carbon nitride films synthesized using atomic transport reactions

C Popov, M.F Plass, L Zambov, J Bulir, M.-P Delplancke-Ogletree, W Kulisch

Journal:

Surface and Coatings Technology

Year:

2000

Language:

english

File:

PDF, 177 KB

english, 2000

19

Correlation between photoluminescence, optical and structural properties of amorphous nitrogen-rich carbon nitride films

M.F. Plass, C. Popov, B. Ivanov, S. Mändl, M. Jelinek, L.M. Zambov, W. Kulisch

Journal:

Applied Physics A: Materials Science & Processing

Year:

2001

Language:

english

File:

PDF, 466 KB

english, 2001

20

Capacitance humidity sensor with carbon nitride detecting element

L.M. Zambov, C. Popov, M.F. Plass, A. Bock, M. Jelinek, J. Lancok, K. Masseli, W. Kulisch

Journal:

Applied Physics A: Materials Science & Processing

Year:

2000

Language:

english

File:

PDF, 158 KB

english, 2000

21

Modeling and optimization of the growth of polycrystalline silicon films by thermal decomposition of silane

G. Peev, L. Zambov, Y. Yanakiev

Journal:

Journal of Crystal Growth

Year:

1990

Language:

english

File:

PDF, 697 KB

english, 1990

22

Optical, electrical and mechanical properties of nitrogen-rich carbon nitride films deposited by inductively coupled plasma chemical vapor deposition

C Popov, L.M Zambov, M.F Plass, W Kulisch

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 270 KB

english, 2000

23

Investigation of the thermal stability of nitrogen-rich amorphous carbon nitride films

W Kulisch, C Popov, L Zambov, J Buliř, M.P Delplancke-Ogletree, J Lančok, M Jelı́inek

Journal:

Thin Solid Films

Year:

2000

Language:

english

File:

PDF, 271 KB

english, 2000

24

Design of Injection Feed Multiwafer Low-Pressure Chemical Vapor Deposition Reactors

Journal:

Journal of The Electrochemical Society

Year:

1998

Language:

english

File:

PDF, 938 KB

english, 1998

25

Advanced chemical vapor deposition silicon carbide barrier technology for ultralow permeability applications

Zambov, Ludmil, Weidner, Ken, Shamamian, Vasgen, Camilletti, Robert, Pernisz, Udo, Loboda, Mark, Cerny, Glenn, Gidley, David, Peng, Hua-Gen, Vallery, Richard

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2006

Language:

english

File:

PDF, 1.60 MB

english, 2006

26

Products and Information

Zambov, Ludmil, Weidner, Ken, Shamamian, Vasgen, Camilletti, Robert, Pernisz, Udo, Loboda, Mark, Cerny, Glenn, Gidley, David, Peng, Hua-Gen, Vallery, Richard

Journal:

Journal for Healthcare Quality

Year:

1994

Language:

english

File:

PDF, 137 KB

english, 1994

27

Kinetics of polysilicon film growth by thermal decomposition of silane

Peev, G, Zambov, L, Shanov, V, Tserovski, L

Journal:

Semiconductor Science and Technology

Year:

1991

Language:

english

File:

PDF, 377 KB

english, 1991

28

On the mechanism of P x O y emission from a silicon pyrophosphate-containing solid planar diffusion source

Peev, G, Rouseva, M, Zambov, L

Journal:

Semiconductor Science and Technology

Year:

1994

Language:

english

File:

PDF, 213 KB

english, 1994

29

LCVD of CNx Layers from NH3,/CCI4. Mixture using CuBr Vapor Laser

Ivanov, B., Popov, C., Dimitrov, D., Shanov, Y, Zambov, L., Georgiev, M., Peev, G.

Journal:

MRS Proceedings

Year:

1997

Language:

english

File:

PDF, 1.28 MB

english, 1997

30

Optimum Design of LPCVD Reactors

Journal:

Journal de Physique IV (Proceedings) /Le Journal de Physique IV

Year:

1995

Language:

english

File:

PDF, 289 KB

english, 1995